Uhlaka oluholayo lwe-IC wubuchwepheshe bokukhiqiza ibhodi lesifunda eliphrintiwe elixhuma izintambo nezingxenye ze-elekthronikhi ngemikhondo yensimbi.Lobu buchwepheshe busetshenziswa kakhulu ekwenzeni amasekethe ahlanganisiwe (IC) kanye namabhodi esekethe aphrintiwe kumishini kagesi.Le ndatshana izokwethula ukusetshenziswa kanye nezinzuzo zamafreyimu aholayo e-IC, futhi ihlole ukusetshenziswa nokusetshenziswa kwe-photolithography ekukhiqizeni uhlaka oluholayo lwe-IC nezinto ezisetshenziswayo.
Okokuqala, uhlaka oluholayo lwe-IC luwubuchwepheshe obuwusizo kakhulu obungathuthukisa kakhulu ukuzinza nokuthembeka kwezinto zikagesi.Ekwenziweni kwe-IC, amafreyimu okuhola ayindlela ethembekile yokuxhuma ugesi eqinisekisa ukuthi izingxenye ze-elekthronikhi ebhodini lesekethe zixhunywe ngokunembile ku-chip eyinhloko.Ngaphezu kwalokho, amafreyimu aholayo e-IC angathuthukisa ukwethembeka kwamabhodi esekethe ngoba angenza amabhodi esekethe abe namandla aphezulu emishini kanye nokumelana nokugqwala okungcono.
Okwesibili, i-photolithography ubuchwepheshe obusetshenziswa kakhulu ekwenzeni amafreyimu aholayo e-IC.Lobu buchwepheshe busekelwe enqubweni ye-photolithography, eyenza amafreyimu omthofu ngokuveza amafilimu amancane ensimbi ekukhanyeni bese ewafaka ngesisombululo samakhemikhali.Ubuchwepheshe be-Photolithography bunobuhle bokunemba okuphezulu, ukusebenza kahle okuphezulu, kanye nezindleko eziphansi, ngakho busetshenziswe kabanzi ekwenziweni kohlaka oluholayo lwe-IC.
Ekwenziweni kohlaka oluholayo lwe-IC, into esemqoka esetshenziswa ifilimu elincanyana lensimbi.Ifilimu encane yensimbi ingaba ithusi, i-aluminium, noma igolide, nezinye izinto.Lawa mafilimu azacile ensimbi ajwayele ukulungiswa ngamasu e-physical vapor deposition (PVD) noma amasu e-chemical vapor deposition (CVD).Ekwenziweni kohlaka oluholayo lwe-IC, lawa mafilimu ensimbi azacile ambozwa ebhodini lesekethe abese eqoshwa kahle ubuchwepheshe be-photolithography ukuze akhiqize amafreyimu omthofu amahle.
Sengiphetha, ubuchwepheshe bohlaka oluholayo lwe-IC budlala indima ebalulekile kumishini yesimanje kagesi.Ngokusebenzisa ubuchwepheshe be-photolithography nezinto zefilimu ezacile zensimbi, ukunemba okuphezulu, ukusebenza kahle okuphezulu, namafreyimu okuhola angabizi kakhulu angenziwa.Inzuzo yalobu buchwepheshe ukuthi bungathuthukisa ukwethembeka nokuzinza kwemishini kagesi, ngaleyo ndlela ibe nomthelela ekuthuthukisweni kobuchwepheshe besimanje be-elekthronikhi.
Isikhathi sokuthumela: Feb-28-2023
